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Rare Earth Oxide Thin Films

Growth, Characterization, and Applications
BuchGebunden
Verkaufsrang14015inPhysik - Astronomie
EUR164,99

Beschreibung

Thin rare earth (RE) oxide films are emerging materials for microelectronic, nanoelectronic, and spintronic applications. The state-of-the-art of thin film deposition techniques as well as the structural, physical, chemical, and electrical properties of thin RE oxide films and of their interface with semiconducting substrates are discussed. The aim is to identify proper methodologies for the development of RE oxides thin films and to evaluate their effectiveness as innovative materials in different applications.
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Details

ISBN/EAN978-3-540-35796-4
ProduktartBuch
EinbandGebunden
Erscheinungsdatum30.10.2006
Auflage2007
ReiheTopics in Applied Physics
Reihen-Nr.106
Seiten444 Seiten
SpracheEnglisch
Artikel-Nr.2383259
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Autor

Marco Fanciulli obtained his PhD in Applied Physics from Boston University, Boston (USA) in 1993 for his work on the characterization of wide-band-gap semiconductors using magnetic resonance spectroscopies. In 1993 he joined the Institute of Physics and Astronomy at the University of Aarhus (DK) as an assistant professor to conduct research on defects in silicon using different techniques (DLTS, CEMS, EPR) and on transition metal silicides. In 1997 he was appointed associate professor. From 1998 he is the director of the MDM Laboratory. He has published more than 120 papers on the growth, by MBE, PLD, ALD, and characterization, using different spectroscopic methods most of them related to hyperfine interaction and magnetic resonance detection, of different materials. His current interests are related to the characterization of high-k materials and of the interface between semiconductors and oxides, to the development of advanced magnetic resonance characterization techniques, and to other fundamental issues related to materials and devices for microelectronics and spintronics. He coordinated the European FET assessment project ESRQC (Electron Spin Resonance for Quantum Computing) and he is the coordinator of industrial projects with STMicroelectronics. He has been the principal investigator in the EC project on nanocrystals (GROWTH: NEON - Nanoparticles for electronics) and on epitaxial high-k dielectrics (IST: INVEST- Integration of very high-k dielectrics with silicon CMOS technology) and he is currently the principal investigator on two EC projects on oxides (IST: ET4US - Epitaxial technologies for ultimate scaling; REALISE - ) as well as in other national projects. Since 2000 he is external Professor of semiconductor physics at the Department of Physics, University of Milano, Milano (Italy). Marco Fanciulli has organized and chaired several symposia (E-MRS 2001, E-MRS 2003, Euromat 2003, Silicon Workshop 2001) and a workshop on quantum computing (Germany 2002).